SEMI F104
Test Method for Evaluation of Particle Contribution of Components Used in Ultrapure Water and Liquid Chemical Distribution Systems
CT Associates offers measurement of particle contribution by various high purity components such as valves, flow meters, regulators, or tubing in ultrapure water and chemicals. The component cleanliness testing services offered follows the SEMI F104 – Test Method for Evaluation of Particle Contribution of Components Used in Ultrapure Water and Liquid Chemical Distribution Systems.
Development and validation of the latest revision of SEMI F104 was conducted at CT Associates putting us in a unique position to provide this testing service. Our semiconductor class ultrapure water system meets the stringent particle cleanliness requirements needed for this test. Testing is performed in a Class 100 cleanroom using state-of-the-art optical particle counting instruments.
Depending on the type of component, a static and/or dynamic test is required to meet the SEMI F104 specification. The static rinse test evaluates the component cleanliness of the component in an open steady state, while the dynamic rinse test evaluates cleanliness during active operation of the component (i.e. actuation of a valve). An optical particle counter (OPC), located downstream of the test component, measures the particles being shed from the test component.
Particle contamination analysis is also available to assist in identifying potential particle contributing sources. Details on collection and analysis techniques may be found here.
Static ≥50 nm Tubing Rinse by OPC
Dynamic ≥50 nm Valve Rinse by OPC
