Publications

CTA believes that publishing the results of research and development strengthens the image of its clients and their products. As a third party with a solid reputation for rigorous work, CTA brings added credibility to product research. Client authorship or acknowledgement is included in all papers and presentations.

Contamination Control

Application of a New SEMI F121 Guide for Evaluating Particle Precursor Metrology (2023)new!
Identification and Management of Potential Particle Precursors from Mixed Bed Ion Exchange (2023)new!
Particle Precursors – a Nonobvious Source of Defectivity Issues (2022)new!
Critical Organics Risk Assessment of High-Purity Polymer Piping (2022)new!
Measurement and Modeling of TOC and Fluorine Ion Extraction from Polymeric Piping in Hot Ultrapure Water (2021)
Proactive Contamination Control for Sub 10nm Particle in Advanced Semiconductor Manufacturing (2019)
The Use of Focused Aerosol Deposition in the Collection and Analysis of Nanoparticles from Ultrapure Water Systems Used in Semiconductor and Pharmaceutical Industry (2019)
Understanding Particle Contribution from Components Used in Ultrapure Water and High-Purity Chemical Systems and Their Impact on Industry-Driven Particle Requirements. (2019)
Use of Extraction Modeling to Predict Contamination Levels in Ultrapure Water Systems (2018)
Comparison of optical particle counting and aerosol-based particle counting technologies for UPW monitoring and diagnostics (2017)
Counting efficiency comparison of liquid optical particle counters below 100 nm (2015)
Application of a 10-nm Particle Counter and Non-volatile residue monitor for component diagnostics within a Ultrapure Water (2015)
Introducing a 10-nm Particle Counter for Ultrapure Water (2014)
Evaluation of Particle Shedding and Trace Metal Extraction from Centrifugal Pumps (2013)
Technique for measuring the particle retention of liquid filters to 10 nanometers (2013)
Comparison of Particle Shedding of High Purity Pumps (2013)
Validating the counting efficiency of liquid optical particle counters below 100 nm (2013)

Particle Precursors and Molecular Contamination

SEMI Standards Testing

Filtration

Particles in High Purity Liquids

Performance and Reliability

Permeation and Diffusion

Chemical Mechanical Planarization

Colloidial Dispersion

Chemical Delivery

Trace Metal Extraction

Containation Control

Particle Precursors and Molecular Contamination

Filtration

Particles in High Purity Liquids

Perfomance and Reliability

Permeaton and Diffusion

Chemical Mechanical Planarizaton

Colloidal Disperson

Chemical Delivery

Trace Metal Extraction

SEMI Standards Testing