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Comparison of Particle Shedding of High Purity Pumps


Authors:

Mark Litchy, Gary Van Schooneveld –⁠ CT Associates, Inc.
Juergen Hahn –⁠ Levitronix


Abstract:

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CTA publication #118: 2013 SEMATECH Workshop on Nanoparticle Defectivity Issues in Solutions July 9, 2013 San Francisco, CA

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