Looking for more information?

Contact Us

Back to Publications

A novel method of measuring sizes and concentrations of 5-500 nm particles in colloidal suspensions

Authors

H. Gary Van Schooneveld, Mark Litchy, Don Grant

Abstract

The ability to measure the sizes and concentration of particles in colloidal suspensions has been a challenge particularly for suspensions with particles smaller than 100 namoneters. A new measurement technique has been developed that allows for measurement of particles as small as 5 nanometers. The technique has demonstrated the ability to provide unique and useful particle size distribution (PSD) data for chemical/mechanical planarization (CMP) slurries used heavily in the micro-electronics industry. The ability to measure filter retention of particles in the 10-20 namometer size range has also been demonstrated.

TechConnect World 2011, Boston, MA

Request Publication