A novel method of measuring sizes and concentrations of 5-500 nm particles in colloidal suspensions
H. Gary Van Schooneveld, Mark Litchy, Don Grant
The ability to measure the sizes and concentration of particles in colloidal suspensions has been a challenge particularly for suspensions with particles smaller than 100 namoneters. A new measurement technique has been developed that allows for measurement of particles as small as 5 nanometers. The technique has demonstrated the ability to provide unique and useful particle size distribution (PSD) data for chemical/mechanical planarization (CMP) slurries used heavily in the micro-electronics industry. The ability to measure filter retention of particles in the 10-20 namometer size range has also been demonstrated.
TechConnect World 2011, Boston, MA