Facilities
2200-ft2 laboratory space
- 200-ft2 Class 10,000 cleanroom with 3 Class 100 hoods
- 450-ft2 Lab with full chemical handling and waste disposal capabilities (acids, bases, slurry)
- 8-ft Wetbench (two bath positions)
- Reliability test cabinets (3)
Process fluids
- Ultrahigh purity water – TYPE E-1.1 (Resistivity > 18.2 MΩ-cm; TOC < 1 ppb; NVR < 1 ppb; Particle concentration < 50 per liter ≥ 100 nm).
- High purity chemicals including 49% HF, 37% HCl, 29% NH4OH and 96% H2SO4
- Chemical-mechanical planarization polishing slurries
- Ozonated water
- Compressed air
- Blanket nitrogen
Analytical instrumentation
High-sensitivity liquid-borne particle counter (patent pending)
- 5nm – 1000nm
- 128 size channels
Liquid-borne optical particle counters (50 nm to 400 μm)
- PMS HSLIS M50 – ≥ 50 nm (3)
- PMS HSLIS M65 – ≥ 65 nm (2)
- PMS Liquistat 100 – ≥ 100 nm (1)
- PMS Liquilaz SO2 – ≥ 200 nm (1)
- PMS Liquilaz SO5 – ≥ 500 nm (1)
- PSS Accusizer 780 – 0.56 to 400 μm (1)
PSS NICOMP 380ZLS –
- Dynamic Light Scattering (3 nm – 1000 μm)
- Zeta potential measurement
TSI Scanning Mobility Particle Sizer (5 nm – 1000 nm)
- Model 3080 Electrostatic Classifier
- Model 3772 Condensation Particle Counter
On-line TOC analyzers (2)
Non-volatile residue monitor (2)
Other – Turbidity, pH, specific ion electrode (multiple), resistivity, surface tension, viscosity, density, mass flow rate