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Facilities

2200-ft2 laboratory space

  • 200-ft2 Class 10,000 cleanroom with 3 Class 100 hoods
  • 450-ft2 Lab with full chemical handling and waste disposal capabilities (acids, bases, slurry)
    • 8-ft Wetbench (two bath positions)
    • Reliability test cabinets (3)

Process fluids

  • Ultrahigh purity water – TYPE E-1.1 (Resistivity > 18.2 MΩ-cm; TOC < 1 ppb; NVR < 1 ppb; Particle concentration < 50 per liter ≥ 100 nm).
  • High purity chemicals including 49% HF, 37% HCl, 29% NH4OH and 96% H2SO4
  • Chemical-mechanical planarization polishing slurries
  • Ozonated water
  • Compressed air
  • Blanket nitrogen

Analytical instrumentation

High-sensitivity liquid-borne particle counter (patent pending)

  • 5nm – 1000nm
  • 128 size channels

Liquid-borne optical particle counters (50 nm to 400 μm)

  • PMS HSLIS M50 – ≥ 50 nm (3)
  • PMS HSLIS M65 – ≥ 65 nm (2)
  • PMS Liquistat 100 – ≥ 100 nm (1)
  • PMS Liquilaz SO2 – ≥ 200 nm (1)
  • PMS Liquilaz SO5 – ≥ 500 nm (1)
  • PSS Accusizer 780 – 0.56 to 400 μm (1)

PSS NICOMP 380ZLS –

  • Dynamic Light Scattering (3 nm – 1000 μm)
  • Zeta potential measurement

TSI Scanning Mobility Particle Sizer (5 nm – 1000 nm)

  • Model 3080 Electrostatic Classifier
  • Model 3772 Condensation Particle Counter

On-line TOC analyzers (2)

Non-volatile residue monitor (2)

Other – Turbidity, pH, specific ion electrode (multiple), resistivity, surface tension, viscosity, density, mass flow rate